Material Processing using VUV Excimer Lamp or Intense Laser

• KAMEYAMA A.

  Dept. of E&E, Univ. of Miyazaki

• KATTO M.

  Cooperative Research Center, Univ. of Miyazaki

• YOKOTANI A.

  Dept. of E&E, Univ. of Miyazaki

• KUROSAWA K.

  Dept. of E&E, Univ. of Miyazaki

Bibliographic Information

Other Title

• 高エネルギー及び高輝度光源を用いたマテリアルプロセッシングの研究

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 341 5-10, 2005-11-17

Keywords

• VUV-CVD
• fs-laser ablation
• excimer-laser ablation

Details

• CRID: 1573105975075031424
• NII Article ID: 10016859040
• NII Book ID: AA11604414
• Text Lang: ja
• Data Source:
  • CiNii Articles
  • KAKEN