Simulation Study of the Dependence of Submicron Polysilicon Thin-Film Transistor Output Characteristics on Grain Boundary Position

• Walker Philip M.

  Microelectronics Research Centre, Cavendish Laboratory, Cambridge University

• Uno Shigeyasu

  School of Mathematical Sciences, Claremont Graduate University

• Mizuta Hiroshi

  Tokyo Institute of Technology

Abstract

We investigate the impact of varying the grain boundary (GB) position on the output (I_d–V_d) characteristics of submicron single GB polysilicon thin film transistors (TFTs), by two-dimensional (2D), drift-diffusion based, device simulation. We employ a localized GB trapping model with a distribution of both donor-like and acceptor-like trap states over the forbidden energy gap of the GB region. We show that for devices with channel lengths in the deep submicron regime, significant variations in output conductance (g_d) occur as the GB position is varied. Specifically, we find that output conductance increases as the GB approaches the drain edge. Furthermore, the sensitivity of output conductance to the GB position increases as channel length decreases. The findings have important implications for any future analogue three-dimensional (3D) IC design that uses polysilicon as a device material.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 44 (12), 8322-8328, 2005

  The Japan Society of Applied Physics

Keywords

• polysilicon
• short channel effects
• grain boundary
• thin-film transistor
• device simulation

Details

• CRID: 1390282681244420224
• NII Article ID: 10016958359
• NII Article ID: 210000059130
• NII Article ID: 130004532997
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.44.8322
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• NDL BIB ID: 7747362
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7747362
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.8322
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.44.8322/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed