Y字状フィルタードアーク蒸着装置の開発と銅配線膜の成膜 [in Japanese] Development of Y-shape Filtered Arc Deposition Apparatus and Cu Film Deposition for Wiring [in Japanese]
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- 岩崎 康浩 IWASAKI Yasuhiro
- 豊橋技術科学大学 Toyohashi University of Technology
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- 彦坂 博紀 HIKOSAKA Hiroki
- 豊橋技術科学大学 Toyohashi University of Technology
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- 田上 英人
- 豊橋技術科学大学
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- 滝川 浩史 TAKIKAWA Hirofumi
- 豊橋技術科学大学 Toyohashi University of Technology
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- 榊原 建樹 SAKAKIBARA Tateki
- 豊橋技術科学大学 Toyohashi University of Technology
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- 長谷川 祐史 HASEGAWA Hiroshi
- 株式会社オンワード技研 Onward Ceramic Coating Co. Ltd
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- 辻 信広 TUJI Nobuhiro
- 株式会社オンワード技研 Onward Ceramic Coating Co. Ltd
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Author(s)
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- 岩崎 康浩 IWASAKI Yasuhiro
- 豊橋技術科学大学 Toyohashi University of Technology
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- 彦坂 博紀 HIKOSAKA Hiroki
- 豊橋技術科学大学 Toyohashi University of Technology
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- 田上 英人
- 豊橋技術科学大学
-
- 滝川 浩史 TAKIKAWA Hirofumi
- 豊橋技術科学大学 Toyohashi University of Technology
-
- 榊原 建樹 SAKAKIBARA Tateki
- 豊橋技術科学大学 Toyohashi University of Technology
-
- 長谷川 祐史 HASEGAWA Hiroshi
- 株式会社オンワード技研 Onward Ceramic Coating Co. Ltd
-
- 辻 信広 TUJI Nobuhiro
- 株式会社オンワード技研 Onward Ceramic Coating Co. Ltd
Journal
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- 電気学会研究会資料. ED, 放電研究会
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電気学会研究会資料. ED, 放電研究会 2005(143), 41-44, 2005-12-08
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