高速工具サーボによる大面積正弦波微細格子基準面の高精度創成 : 格子基準面ローカル領域の高精度化 [in Japanese] High-accuracy Fabrication of a Sinusoidal Grid Surface Over a Large Area by Fast Tool Servo : Improvement of Fabrication Accuracy in Local Areas of the Grid Surface [in Japanese]
-
- 田野 誠 TANO Makoto
- 東北大学大学院工学研究科ナノメカニクス専攻
-
- 高 偉 GAO Wei
- 東北大学工学研究科 Department of Nanomechanics, Tohoku University
-
- 荒木 武 [他] ARAKI Takeshi
- (株)日立ディスプレイズ
-
- 清野 慧 KIYONO Satoshi
- 東北大学工学研究科 Department of Nanomechanics, Tohoku University
Search this Article
Author(s)
-
- 田野 誠 TANO Makoto
- 東北大学大学院工学研究科ナノメカニクス専攻
-
- 高 偉 GAO Wei
- 東北大学工学研究科 Department of Nanomechanics, Tohoku University
-
- 荒木 武 [他] ARAKI Takeshi
- (株)日立ディスプレイズ
-
- 清野 慧 KIYONO Satoshi
- 東北大学工学研究科 Department of Nanomechanics, Tohoku University
Journal
-
- Transactions of the Japan Society of Mechanical Engineers C
-
Transactions of the Japan Society of Mechanical Engineers C 71(712), 3602-3607, 2005-12-25
日本機械学会
References: 7
-
1
- Gerenation of Fine Surface Figures by Means of a Diamond Turning [in Japanese]
-
OKAZAKI Yuichi
Shinku 40(6), 541-545, 1997-06-20
J-STAGE References (3) Cited by (1)
-
2
- Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder
-
GAO W.
Precision Engineering 27, 289, 2003
Cited by (14)
-
3
- An Angle-Based Position Detection Method for Precision Machines
-
KIYONO Satoshi , CAI Ping , GAO Wei
JSME International Journal Ser. C Mechanical Systems, Machine Elements and Manufacturing 42(1), 44-48, 1999-03
IR References (6) Cited by (6)
-
4
- A Surface Encoder with a Multi-Spot Light Source [in Japanese]
-
GAO Wei , HOSHINO Tadashi , SHIMIZU Yuki , KIYONO Satoshi
Journal of the Japan Society for Precision Engineering 68(1), 70-74, 2002-01-05
J-STAGE References (9) Cited by (5)
-
5
- Creation of Multiple-focus Micro Fresnel Lens Using Non-Rotational Cutting Tools [in Japanese]
-
MAEDA Shinji , TAKEUCHI Yoshimi , SAWADA Kiyoshi , KAWAI Tomohiko , SATA Toshio
Journal of the Japan Society for Precision Engineering 67(9), 1463-1467, 2001-09-05
J-STAGE References (8) Cited by (4)
-
6
- Analysis of cutting temperature in ultra-high precision diamond cutting of copper. [in Japanese]
-
IWATA Kazuaki , MORIWAKI Toshimichi , OKUDA Koichi
Journal of the Japan Society for Precision Engineering 53(8), 1253-1258, 1987
J-STAGE Cited by (2)
-
7
- Chip Morphology and Minimum Thickness of Cut in Micromachining. [in Japanese]
-
IKAWA Naoya , SHIMADA Shoichi , DONALDSON R.R. , SYN C.K. , TAYLOR J.S. , OHMORI Giichi , TANAKA Hiroaki , YOSHINAGA Hirotoshi
Journal of the Japan Society for Precision Engineering 59(4), 673-679, 1993
J-STAGE Cited by (2)