Manipulation of fine objects by probes of the electrostatic chuck type

• KOBAYASHI Mikihiko

  National Institute for Materials Science

• KONNO Takeshi

  National Institute for Materials Science

• EGASHIRA Mitsuru

  National Institute for Materials Science

Abstract

Particle assemblage by probe manipulation is a built-up process to fabricate microstructures. We investigated the probe manipulation method featured by applying voltages to the probe to control the adhesion force. Two types of probe are fabricated. One is a monopole probe and the other is a dipole probe. The former is composed of a needle-like metal wire, and the voltage is applied between the probe and the external electrode like a metal substrate. The latter is composed of a needle-like electrode and a stainless tube arranged concentrically. The tip of the monopole probe was shaped hemispherically by insulating resin. The monopole probe can catch fine particles of 10 μm to 100 μm on the metal substrate, while the monopole probe can catch both conductive particles and dielectric particles without the restriction of substrates. The particles jump up to the tip of the probe and adhere. The features of the two probes are compared.

Journal

• Journal of Advanced Science

  Journal of Advanced Science 18 (1/2), 86-89, 2006

  Society of Advanced Science

Keywords

• Monopole probe
• Dipole probe
• Electrostatic chuck
• Probe manipulation

Details

• CRID: 1390282679317507968
• NII Article ID: 130004487807
• NII Article ID: 10017410466
• NII Book ID: AA11948435
• DOI: 10.2978/jsas.18.86
• ISSN: 18813917
• ISSN: 09155651
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed