Application to temperature and strain sensitive tactile sensor of Cr-N and Fe-Pd thin films

• SASAKI Yoshihiro

  The Research Institute for Electric and Magnetic Materials

• NIWA Eiji

  The Research Institute for Electric and Magnetic Materials

• MASUMOTO Katashi

  The Research Institute for Electric and Magnetic Materials

Bibliographic Information

Other Title

• Cr-NおよびFe-Pd薄膜の温度・歪同時計測触覚センサへの応用

Journal

• 電気学会研究会資料. PHS, フィジカルセンサ研究会

  電気学会研究会資料. PHS, フィジカルセンサ研究会 2006 (1), 35-40, 2006-05-15

Keywords

• tactile sensor
• temperature sensor
• strain sensor
• temperature coefficient of resistivity
• gauge factor
• thin film

Details

• CRID: 1574231874942955648
• NII Article ID: 10017585910
• NII Book ID: AA11486078
• Text Lang: ja
• Data Source:
  • CiNii Articles
  • KAKEN