Proximity Effect in Electron-Beam-Induced Deposition

• Kazutaka Mitsuishi

• Masayuki Shimojo

• Masaki Takeguchi

Bibliographic Information

Other Title

• Proximity Effect in Electron Beam Induced Deposition
• Special Issue: Microprocesses & Nanotechnology
• Special Issue Microprocesses Nanotechnology

Abstract

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Journal

• Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45 (6B), 5517-5521, 2006-06

  Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Keywords

• CVD
• nanofabrication

Details

• CRID: 1520853831999975808
• NII Article ID: 10017998899
• NII Book ID: AA10457675
• ISSN: 00214922
• ISSN: 13474065
• DOI: 10.1143/jjap.45.5517
• NDL BIB ID: 7962257
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7962257
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.5517
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.5517/pdf
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles