Enhancement of Secondary Ion Intensities from Polymers in the TOF-SIMS Analysis using Gold Cluster Ions

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  • KUDO Masahiro
    Department of Materials and Life Science, Faculty of Science and Technology, Seikei University
  • AIMOTO Kenichi
    Department of Materials and Life Science, Faculty of Science and Technology, Seikei University
  • KATO Nobuhiko
    Department of Materials and Life Science, Faculty of Science and Technology, Seikei University
  • AOYAGI Satoka
    Department of Regional Development, Faculty of Life and Environmental Science, Shimane University
  • IIDA Noriko
    ULVAC-PHI, Inc.
  • YAMAMOTO Akira
    ULVAC-PHI, Inc.

Bibliographic Information

Other Title
  • Auクラスター一次イオン源を用いたTOF-SIMS測定における二次イオン強度増大効果
  • Au クラスター 1ジ イオン ゲン オ モチイタ TOF SIMS ソクテイ ニ オケル 2ジ イオン キョウド ゾウダイ コウカ

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Abstract

Enhancement of the secondary ion intensity in the TOF-SIMS spectra obtained by Au+ and Au3+ bombardment was investigated in comparison with Ga+ excitation using polymer samples with different molecular weight distributions. Since the polymer samples used in this experiment have wide molecular weight distributions, the advantages of a gold cluster primary ion source over a monoatomic ion source could systematically be evaluated. It was found that a Au primary ion source for a TOF-SIMS instrument has advantages in such terms as (1) the mass effect of the monoatomic primary ion, i.e., Au+ vs. Ga+, (2) the cluster primary ion effect of Au3+ compared with Au+ and Ga+, and (3)decrease in the degree of fragmentation by usage of a cluster primary ion beam compared with a monoatomic ion beam.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 27 (9), 518-522, 2006

    The Surface Science Society of Japan

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