Aggregation of Nitrogen on Oxygen Precipitate in Annealed Czochralski Silicon Wafer Observed by Secondary Ion Mass Spectroscopy Measurement

• Katsuto Tanahashi

• Hiroshi Yamada-Kaneta

収録刊行物

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 45 (4-7), L148-150, 2006

  Tokyo : Japan Society of Applied Physics

キーワード

• SIMS
• Infrared absorption

詳細情報

• CRID: 1521136280834070016
• NII論文ID: 10018158958
• NII書誌ID: AA11906093
• ISSN: 00214922
• NDL書誌ID: 7822075
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7822075
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles