Nanoprocessing of Diamond Using a Variable Pressure Scanning Electron Microscope

• NIITSUMA Jun-ichi

  Nanomaterials Laboratory, National Institute for Materials Science

• YUAN Xiao-li

  Nanomaterials Laboratory, National Institute for Materials Science

• KOIZUMI Satoshi

  Advanced Materials Laboratory, National Institute for Materials Science

• SEKIGUCHI Takashi

  Nanomaterials Laboratory, National Institute for Materials Science

Journal

• Japanese journal of applied physics. Pt. 2, Letters

  Japanese journal of applied physics. Pt. 2, Letters 45 (1), L71-L73, 2006-01-25

Keywords

• variable-pressure SEM
• diamond
• electron beam
• nanoprocessing

Details

• CRID: 1571417125358288896
• NII Article ID: 10018159655
• NII Book ID: AA10650595
• ISSN: 00214922
• Text Lang: en
• Data Source:
  • CiNii Articles