Characteristics of Micro-Plasma Utilizing Minute Gas Flow Supplied DC Pulse Voltage
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- Urakabe Takahiro
- Advanced Technology R&D Center, Mitsubishi Electric Corp. Dept. of Electrical and Electronic Engineering, Tokyo Institute of Technology
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- Yakushiji Hajime
- Dept. of Electrical and Electronic Engineering, Tokyo Institute of Technology
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- Yokoyama Takuma
- Dept. of Electrical and Electronic Engineering, Tokyo Institute of Technology
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- Ibuka Shinji
- Dept. of Electrical and Electronic Engineering, Tokyo Institute of Technology
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- Ishii Shozo
- Dept. of Electrical and Electronic Engineering, Tokyo Institute of Technology
Bibliographic Information
- Other Title
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- 微細ガス流マイクロプラズマの直流パルス電圧印加特性
- ビサイ ガスリュウ マイクロプラズマ ノ チョクリュウ パルス デンアツ インカ トクセイ
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Abstract
This paper describes a suitable driving circuit for micro-plasma sources utilizing the minute gas flow DC discharge. The generator must be provided with a circuit supplying primitive breakdown voltage and one supplying voltage to sustain discharge to obtain an efficient plasma apparatus. Three circuits sustaining discharge are proposed. One regulates DC voltage, another supplies pulse voltage and the other regulates resistance connected with a discharge gap in series. Characteristics of gas flow discharge with helium by supplying DC and DC pulse voltage between a tiny tubular electrode and a metal cathode are examined. The results show that the way supplying pulse voltage has merits which are generating plasma with higher peak energy and obtaining wider plasma energy range compared with the one supplying DC voltage. The paper shows that a circuit supplying pulse voltage is more efficient than one regulating resistance and is smaller than one regulating DC voltage, also.
Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 126 (8), 795-800, 2006
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204592837888
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- NII Article ID
- 10018181465
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL BIB ID
- 8053539
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed