Adhesion Forces Reduction for Micromanipulation Based on Mivro Physics

• ARAI F.

収録刊行物

• Proc. IEEE Micro Electro Mechanical Systems, 1996

  Proc. IEEE Micro Electro Mechanical Systems, 1996 1996

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• CRID: 1570291225409499264
• NII論文ID: 10018207640
• データソース種別:
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