Deposition of Mechanically Hard Amorphous Carbon Nitride Films with High [N]/([N]+[C]) Ratio

• Haruhiko Ito

• Kenzo Hori

• Kei-ichi C. Namiki

書誌事項

タイトル別名

• Deposition of Mechanically Hard Amorphous Carbon Nitride Films with High N N C Ratio
• Special Issue: Plasma Processing
• Special Issue Plasma Processing

抄録

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

収録刊行物

• Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45 (10B), 8418-8423, 2006-10

  Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

キーワード

• IR spectra
• Raman spectra
• mechanical hardness

詳細情報

• CRID: 1520290882874638080
• NII論文ID: 10018340059
• NII書誌ID: AA10457675
• ISSN: 00214922
• ISSN: 13474065
• ISSN: http://id.crossref.org/issn/13474065
• DOI: 10.1143/jjap.45.8418
• NDL書誌ID: 8521218
• Web Site: http://id.ndl.go.jp/bib/8521218
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8521218
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.8418
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.8418/pdf
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • Crossref
  • CiNii Articles