Very high growth rate epitaxy processes with chlorine addition

• LA VIA F.

収録刊行物

• Technical program of the 16th European conference on silicon carbide and related materials (Sep. 3-7, 2006, Newcastle upon Tyne, UK)

  Technical program of the 16th European conference on silicon carbide and related materials (Sep. 3-7, 2006, Newcastle upon Tyne, UK) 2006

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• CRID: 1573668925128814336
• NII論文ID: 10018406260
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