イオンビーム誘起化学蒸着法による酸化スズ薄膜の作製

書誌事項

タイトル別名
  • Tin Oxide Thin Films Prepared by Ion Beam Induced Chemical Vapor Deposition

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抄録

  We deposited transparent and electrical conductive thin films on polymer substrates ZEONOR® (cycloolefin) by oxygen ion beam induced chemical vapor deposition (IBICVD) with tetramethylstannane (TMS). The film depositions were carried out the acceleration voltage of oxygen ion beam in range from 50 to 300 eV. The deposition time was fixed at 180 minutes at all conditions. Under irradiation of 300 eV oxygen ions, the optical transmittance at 550 nm and the resistivity of the prepared film were 80% and 5.4×10-2 Ω•cm, respectively. When oxygen ion energy increased from 50 to 300 eV, root mean square of roughness and contamination of carbon were decreased.<br>

収録刊行物

  • 真空

    真空 49 (12), 780-781, 2006

    一般社団法人 日本真空学会

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詳細情報

  • CRID
    1390001204064709632
  • NII論文ID
    10018457721
  • NII書誌ID
    AN00119871
  • DOI
    10.3131/jvsj.49.780
  • ISSN
    18809413
    05598516
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • Crossref
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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