Fabrication of Micro-Lens Array using a Chemically Adsorbed Monomolecular Layer

• Okada Kazushi

  Oohira Labs.

• Oohira Fumikazu

  Oohira Labs.

• Hosogi Maho

  Oohira Labs.

• Hashiguchi Gen

  Oohira Labs.

• Mihara Yutaka

  Oohira Labs.

• Ogawa Kazufumi

  Ogawa Labs.

• Shiwaku Kazuya

  Oohira Labs.

Bibliographic Information

Other Title

• 化学吸着単分子膜を利用したマイクロレンズアレイ製作法
• カガク キュウチャク タンブンシ マク オ リヨウ シタ マイクロレンズ アレイ セイサクホウ
• Fabrication of micro-lens array using a chemically absorbed monomolecular layer

Abstract

We proposed a new method of patterning a chemically adsorbed monomolecular layer on the substrate and then dropping UV cure material to form a lens shape using oil repellent effect of this film. The curvature radius of the lens was controlled by the amount of the dropped UV cure material. Using this method, a micro-lens array of various radiuses was fabricated. The formed micro-lens array shapes are transferred by the electro-plating and then the micro dies are fabricated, which are used for molding the plastic lens array. The optical characteristic of the molded micro-lens was evaluated.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 127 (2), 82-88, 2007

  The Institute of Electrical Engineers of Japan

Keywords

• chemically absorbed monomolecular layer
• oil repellent effect
• micro-lens array
• die
• molding

Details

• CRID: 1390282679437202048
• NII Article ID: 10018480063
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.127.82
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 8668884
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8668884
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/127/2/127_2_82/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed