Development of a 3-Dimensional LIGA Process and Application to Fabricate a Spiral Microcoil
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- Mekaru Harutaka
- Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
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- Kusumi Shinji
- SUSUMU Co., Ltd
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- Sato Noriaki
- Juken Kogyo Co., Ltd
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- Shimizu Masami
- Juken Fine Tool Co., Ltd
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- Yamashita Michiru
- Hyogo Prefectural Institute of Technology
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- Shimada Osamu
- SUSUMU Co., Ltd
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- Hattori Tadashi
- Laboratory of Advanced Science and Technology for Industry, University of Hyogo
Bibliographic Information
- Other Title
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- ＬＩＧＡプロセスの三次元化とスパイラル型マイクロコイルの作製
- LIGA プロセス ノ 3ジゲンカ ト スパイラルガタ マイクロコイル ノ サクセイ
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Abstract
LIGA process has been developed in the 2.5-dimensional world. We introduced new technologies of a 3D X-ray lithography and a worm injection molding with an unscrewing demolding mechanism, and succeeded in the deployment of a three- dimensional LIGA process. Furthermore, it succeeded to fabricate a spiral microcoil using 3D-LIGA process and a metallization technique combined flat and smooth electroplating and isotropic chemical etching. A diameter of the microcoil was 0.5 mm and the length was 1 mm. The width of coil lines was 10 μm, and the pitch was 20 μm. Also the characteristics as an inductor of this microcoil is such that the inductance and the quality factor at the frequency of 1 GHz was 91 nH and 5.8, respectively.
Journal
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- IEEJ Transactions on Electronics, Information and Systems
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IEEJ Transactions on Electronics, Information and Systems 127 (2), 160-166, 2007
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679583083520
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- NII Article ID
- 10018480428
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- NII Book ID
- AN10065950
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- ISSN
- 13488155
- 03854221
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- NDL BIB ID
- 8668212
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed