Inductively-Coupled r.f. Plasma Reactor for Destruction of Ozone Depleting Substances

• MIZUNO Koichi

  National Institute for Resources and Evironment

• SUZUKI Michihiko

  Clean Japan Center

• KOBAYASHI Atsushi

  Nippon Steel Corp.

• IMOTO Kazuo

  Nippon Steel Corp.

• TAKEUCHI Sunao

  Nippon Steel Corp.

• KOMAKI Hisashi

  JEOL Ltd.

• OHYAMA Chyoshichiro

  Ichikawa Environment Engineering Co., Ltd.

• TAKAICHI Tsuyoshi

  Japan Fluorocarbon Manufacturers Association

• ASAKURA Tomomi

  Tokyo Electric Power Co.

• PRIETO Graciela

  Nacional Tucuman Universidad

Journal

• Thermal Science and Engineering

  Thermal Science and Engineering 4 (1), 141-146, 1996-01-01

Keywords

• Inductively-coupled r.f. plasma
• chlorofluorocarbons
• Halons
• Decomposition

Details

• CRID: 1571417125357795584
• NII Article ID: 10018603142
• NII Book ID: AA11358679
• ISSN: 09189963
• Text Lang: en
• Data Source:
  • CiNii Articles