先端半導体プロセスの数値解析

• BUCKLE Ursula

  Sanyo Electric Co., Ltd. Mechatronics Research Center

Bibliographic Information

Other Title

• Numerical Simulation of Czocharalski Processes for Advanced Semiconductor Materials

Journal

• 伝熱研究 = News of HTSJ

  伝熱研究 = News of HTSJ 35 (138), 73-, 1996-07-01

Details

• CRID: 1573668925171564160
• NII Article ID: 10018605348
• NII Book ID: AN0015409X
• ISSN: 09107851
• Text Lang: en
• Data Source:
  • CiNii Articles