Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion
This paper presents electrostatically controlled linear inchworm actuator for precise step and parallel motion. Electrostatically controlled linear inchworm actuator can provide a high accuracy (nm order), a large stroke (mm order) and parallel motion of multi sliders. Micro electro mechanical systems technology allows batch fabricated multi sliders. Batch-fabricated multi sliders can be driven by a proposed strategy based on an inchworm motion. Electrostatically controlled linear inchworm actuator employs an electrostatic clutch mechanism in order to control motion transmission from a piezoelectric oscillator to multi sliders for the inchworm motion. Independent control of motions of multi sliders arranged on a single driving system with the piezoelectric oscillator will be presented. This paper reports design, fabrication and demonstration of a proposed system, followed by a prospect of our study toward dynamic gain equalizer as optical application.
- 電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society
電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society 126(10), 1325-1329, 2006-10-01
The Institute of Electrical Engineers of Japan