Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

• BELLOUARD Y.

収録刊行物

• Opt. Express

  Opt. Express 12 2120-, 2004

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• CRID: 1570009750439992576
• NII論文ID: 10018790827
• データソース種別:
  • CiNii Articles