Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiator

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Author(s)

Journal

  • Precision Engineering

    Precision Engineering 31(2), 139-145, 2007-02-01

References:  8

Cited by:  3

Codes

  • NII Article ID (NAID)
    10018869385
  • NII NACSIS-CAT ID (NCID)
    AA11537543
  • Text Lang
    ENG
  • Article Type
    Journal Article
  • ISSN
    01416359
  • Data Source
    CJP  CJPref 
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