Crystallization of double-layered silicon thin films by solid green laser annealing

• Yuta Sugawara

• Yukiharu Uraoka

• Hiroshi Yano

Bibliographic Information

Other Title

• Crystallization of double layered silicon thin films by solid green laser annealing

Journal

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 46 (8-11), L164-166, 2007-03

  Tokyo : Japan Society of Applied Physics

Keywords

• low-temperature poly-Si
• thin film transistor
• green laser
• crystallization

Details

• CRID: 1520010380520219648
• NII Article ID: 10018902932
• NII Book ID: AA11906093
• ISSN: 00214922
• NDL BIB ID: 8695194
• Web Site: http://id.ndl.go.jp/bib/8695194
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8695194
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • CiNii Articles