Miniaturized Magnetic Field Probe and its Application to LSI Chip Measurement

• ANDO Noriaki

  NEC Corporation

• MASUDA Norio

  NEC Corporation

• TAMAKI Naoya

  NEC Corporation

• KURIYAMA Toshihide

  NEC Corporation

• YAMAGUCHI Masahiro

  Tohoku University

Bibliographic Information

Other Title

• 小型磁界センサとLSIへの応用

Journal

• 電気学会研究会資料. PHS, フィジカルセンサ研究会

  電気学会研究会資料. PHS, フィジカルセンサ研究会 2003 (13), 25-30, 2003-11-28

Keywords

• magnetic field sensor
• microstrip line
• magnetic near field measurement
• high spatial resolution
• edge effect
• LSI

Details

• CRID: 1573950400119958656
• NII Article ID: 10018971558
• NII Book ID: AA11486078
• Text Lang: ja
• Data Source:
  • CiNii Articles