ゾルゲル水熱処理によるPZT膜の低温作製

• WEI Zhiqiang

  Graduate School of Engineering Science, Osaka University

• NODA Minoru

  Graduate School of Engineering Science, Osaka University

• OKUYAMA Masanori

  Graduate School of Engineering Science, Osaka University

Bibliographic Information

Other Title

• Preparation of PZT Thin Films by Hydrothermal Treatment Following Sol-gel Method at Low-temperature

Journal

• 電気学会研究会資料. PHS, フィジカルセンサ研究会

  電気学会研究会資料. PHS, フィジカルセンサ研究会 2002 (1), 1-6, 2002-09-19

Keywords

• PZT
• thin film
• hydrothermal
• sol-gel
• post-bake

Details

• CRID: 1570009750446328832
• NII Article ID: 10018971847
• NII Book ID: AA11486078
• Text Lang: en
• Data Source:
  • CiNii Articles