Fabrication and Characterization of Specific Sonic Micro Sensors Using PZT Film on Si Diaphragm and Cantilever

• MURAKAMI Shuichi

  Technology Research Institute of Osaka Prefecture

• INOUE Koji

  Technology Research Institute of Osaka Prefecture

• SUZUKI Yoshihiko

  Technology Research Institute of Osaka Prefecture

• TAKAMATSU Shigeo

  Technical Research Institute, Hitachi Zosen Corporation

• KITANO Tomoko

  Technical Research Institute, Hitachi Zosen Corporation

• KINOSHITA Masao

  Technical Research Institute, Hitachi Zosen Corporation

• YAMASHITA Kaoru

  Osaka University

• OKUYAMA Masanori

  Osaka University

Bibliographic Information

Other Title

• PZT膜を用いた特定音波検知マイクロセンサの作製とその特性

Journal

• 電気学会研究会資料. PHS, フィジカルセンサ研究会

  電気学会研究会資料. PHS, フィジカルセンサ研究会 2002 (1), 19-22, 2002-09-19

Keywords

• Specific Sonic Wave
• Sonic Sensor
• PZT
• SOI wafer
• MEMS

Details

• CRID: 1571417125329875456
• NII Article ID: 10018971884
• NII Book ID: AA11486078
• Text Lang: ja
• Data Source:
  • CiNii Articles