Development of High Power Helium ICP with a New Externally Air-cooling Torch

• MIYAHARA Hidekazu

  Tokyo Institute of Technology

• YABUTA Hironobu

  Tokyo Institute of Technology

• HAYASHI Yasushi

  Tokyo Institute of Technology

• HOTTA Eiki

  Tokyo Institute of Technology

• OKINO Akitoshi

  Tokyo Institute of Technology

Bibliographic Information

Other Title

• 外部冷却型高出力ヘリウムICPの開発

Journal

• 電気学会研究会資料. PST, プラズマ研究会

  電気学会研究会資料. PST, プラズマ研究会 2003 (11), 31-36, 2003-03-14

Keywords

• helium ICP
• ICP torch
• air cooling
• elemental analysis
• atmic emittion

Details

• CRID: 1573387450205956736
• NII Article ID: 10018980483
• NII Book ID: AA11501025
• Text Lang: ja
• Data Source:
  • CiNii Articles