Inductively Coupled Plasma by means of a Novel External Antenna

• FUJITA Hiroharu

  Department of Electrical and Electronic Engineering Saga University

• NASSER Mahmood

  Department of Electrical and Electronic Engineering Saga University

• OHTSU Yasunori

  Department of Electrical and Electronic Engineering Saga University

Journal

• 電気学会研究会資料. PST, プラズマ研究会

  電気学会研究会資料. PST, プラズマ研究会 2001 (1), 47-50, 2001-04-19

Details

• CRID: 1573668925182775040
• NII Article ID: 10018981493
• NII Book ID: AA11501025
• Text Lang: en
• Data Source:
  • CiNii Articles