Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators

• Fukushige Takashi

  Tokyo Institute of Technology, Precision and Intelligence Laboratory

• Hayashi Takehiko

  Tokyo Institute of Technology, Precision and Intelligence Laboratory

• Hata Seiichi

  Tokyo Institute of Technology, Precision and Intelligence Laboratory

• Shimokohbe Akira

  Tokyo Institute of Technology, Precision and Intelligence Laboratory

抄録

This paper describes a built-in capacitive displacement sensor for microactuators. The sensor with long full-scale range is developed for electrostatic microactuators that have a large out-of-plane motion range. A carrier wave with a frequency of 24 MHz is utilized to measure the capacitance between the moving electrode and the sensing electrode of the actuator. The zero method, wherein an additional feedback signal cancels the received signal at the sensing electrode, is applied. The method prevents the fluctuation of the displacement signal caused by the high driving voltage for the electrostatic actuator. The validity of the sensor is demonstrated by using a large-size actuator prior to applying the sensor to an actual microactuator. The acquired full-scale range, sensing band, resolution and linearity were respectively 4.5 mm, from DC to 30 kHz, 60 μm on average, and ±2.5%FS.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 126 (9), 522-527, 2006

  一般社団法人 電気学会

キーワード

• Built-in sensor
• Capacitive displacement sensor
• Microactuator

詳細情報

• CRID: 1390282679436995456
• NII論文ID: 10019289577
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.126.522
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 8079107
• Web Site: http://id.ndl.go.jp/bib/8079107
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8079107
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/126/9/126_9_522/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可