Development of Micro-aperture for Annular Pupil on Electron Optics by Focused Ion Beam Technique

DOI Web Site 15 References
  • FUJIWARA Makoto
    Division of Entrepreneur, Graduate School of Engineering, Osaka Sangyo University
  • TANAKA Takeo
    Division of Entrepreneur, Graduate School of Engineering, Osaka Sangyo University
  • SHIMIZU Ippei
    Osaka Industrial Promotion Organization
  • MATSUTANI Takaomi
    Department of Electronics & Lightwave Sciences, Faculty of Information and Communication Engineering, Osaka Electro-Communication University
  • HISAKA Masaki
    Department of Electronics & Lightwave Sciences, Faculty of Information and Communication Engineering, Osaka Electro-Communication University
  • YASUE Tsuneo
    Department of Electronics & Lightwave Sciences, Faculty of Information and Communication Engineering, Osaka Electro-Communication University
  • IKUTA Takashi
    Department of Electronics & Lightwave Sciences, Faculty of Information and Communication Engineering, Osaka Electro-Communication University
  • TAYA Masaki
    Department of Material and Life Science, Division of Advanced Science and Biotechnology, Graduate School of Engineering, Osaka University
  • KIMURA Yoshihide
    Department of Material and Life Science, Division of Advanced Science and Biotechnology, Graduate School of Engineering, Osaka University
  • TAKAI Yoshizo
    Department of Material and Life Science, Division of Advanced Science and Biotechnology, Graduate School of Engineering, Osaka University
  • KAWASAKI Tadahiro
    EcoTopia Science Institute, Nagoya University
  • ICHIHASHI Mikio
    EcoTopia Science Institute, Nagoya University

Bibliographic Information

Other Title
  • 集束イオンビームを用いた電子光学系輪帯瞳用アパーチャの作製
  • シュウソク イオン ビーム オ モチイタ デンシ コウガクケイ リンタイ ドウヨウ アパーチャ ノ サクセイ

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Abstract

  Micro-apertures for annular pupil on electron optics have been developed using a focused ion beam technique to realize an increase in the depth of focus, aberration-free imaging and separation of amplitude and phase images under scanning transmission electron microscopy (STEM). A tantalum plate 30 μm thick was used as the annular pupil material in the present experiment. The apertures were designed with various outer diameters from φ120 μm to φ60 μm and at inner diameter of 80% outer diameter. Fabricated apertures were characterized by a scanning ion-beam microscope and a scanning electron microscope. Apertures were successfully obtained at the designed size, although the slits of the pupils were slightly tapered by the ion-beam etching process. These annular pupils were loaded on a STEM and confirmed to display no charge-up phenomenon by observation of the projection image on a scintillator using a CCD camera.<br>

Journal

  • Shinku

    Shinku 50 (10), 639-643, 2007

    The Vacuum Society of Japan

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