A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning : Part 2 : Dynamics, control and performance analysis

• DONG Jingyan

  Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

• YAO Qing

  Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

• FERREIRA Placid M.

  Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign

Journal

• Precision engineering

  Precision engineering 32 (1), 20-33, 2008-01-01

Keywords

• Nano-positioning
• Parallel-kinematics
• Flexure stage
• Motion control
• Contouring errors

Details

• CRID: 1570009750604454656
• NII Article ID: 10020009600
• NII Book ID: AA11537543
• ISSN: 01416359
• Text Lang: en
• Data Source:
  • CiNii Articles