Cellulose Spherical Microbeads Interfacially-controlled by Hard Inorganic Nano-Particles Using Viscose Phase Separation Method and Their Applications to Abrasive Materials

• NAGAOKA Shoji

  Kumamoto Industrial Research Institute

• HIRAKAWA Kazunari

  Nishinihon Nagase Co., Ltd.

• KOBAYASHI Seitaro

  Department of Applied Chemistry and Biochemistry, Faculty of Engineering, Kumamoto University

• SATOH Ken

  Nishinihon Nagase Co., Ltd.

• NAGATA Masanori

  Kumamoto Industrial Research Institute

• TAKAFUJI Makoto

  Department of Applied Chemistry and Biochemistry, Faculty of Engineering, Kumamoto University

• IHARA Hirotaka

  Department of Applied Chemistry and Biochemistry, Faculty of Engineering, Kumamoto University

Bibliographic Information

Other Title

• 硬質無機材料によるセルロース球状粒子の界面制御とセルロース複合砥粒材への応用
• コウシツ ムキ ザイリョウ ニ ヨル セルロース キュウジョウ リュウシ ノ カイメン セイギョ ト セルロース フクゴウ トリュウザイ エノ オウヨウ

Abstract

We prepared various types of cellulose/inorganic particle- composite spherical microbeads. These were hybridized with SiC, Al₂O₃ and diamond particles by a one-step phase separation method using a viscose and a sodium polyacrylate aqueous solution, respectively, as abrasives to lap silicon wafer. It was found that the differences relative to the electrophoretic mobility of inorganic particles in viscose influenced the distribution of particles that were contained in the obtained microspheres. The cellulose/SiC or diamond particles composite spherical microbeads were covered with SiC (mean particle diameter: 1 μm) or diamond particles (mean particle diameter: 200 nm or 600 nm), respectively, since their distributions of electrophoretic mobility were narrow in pH 13 aqueous solution under sphering condition. In addition the lapping with the cellulose/diamond-200 nm composite spherical microbeads provided the more favorable profile to surfaces of silicon wafers than diamond alone. A novel lapping method, was developed in which cellulose/diamond composite spherical microbeads were introduced to accomplish high abrasive performance.<br>

Journal

• KOBUNSHI RONBUNSHU

  KOBUNSHI RONBUNSHU 65 (1), 80-89, 2008

  The Society of Polymer Science, Japan

Keywords

• Cellulose
• Viscose
• Spherical Microbeads
• Diamond
• Silicon Wafer

Details

• CRID: 1390282681500478848
• NII Article ID: 10020123737
• NII Book ID: AN00085011
• DOI: 10.1295/koron.65.80
• ISSN: 18815685
• ISSN: 03862186
• NDL BIB ID: 9361785
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9361785
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed