Active Control of the Oxidization of a Silicon Cantilever for the Characterization of Silicon-based Semiconductors

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Author(s)

Journal

  • Chemistry letters

    Chemistry letters 37(1), 122-123, 2008-01-05

References:  11

Codes

  • NII Article ID (NAID)
    10020148416
  • NII NACSIS-CAT ID (NCID)
    AA00603318
  • Text Lang
    ENG
  • Article Type
    SHO
  • ISSN
    03667022
  • Data Source
    CJP 
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