Critical Thickness and Surface Oxidation of Epitaxial AlN Thin Films

Author(s)

Journal

  • Integrated Ferroelectrics

    Integrated Ferroelectrics 24, 129-137, 1999

Cited by:  1

Codes

  • NII Article ID (NAID)
    10020259516
  • Article Type
    Journal Article
  • Data Source
    CJPref 
Page Top