Thin Film Deposition from Supercritical Fluids

• KONDOH Eiichi

  Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi

Bibliographic Information

Other Title

• 超臨界流体を利用した薄膜形成技術
• チョウリンカイ リュウタイ オ リヨウ シタ ハクマク ケイセイ ギジュツ

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 57 (10), 695-700, 2006

  The Surface Finishing Society of Japan

Keywords

• Thin Films
• Supercritical Fluids

Details

• CRID: 1390001204119407744
• NII Article ID: 10020609638
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.57.695
• COI: 1:CAS:528:DC%2BD28XhtFKltb7F
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 8544622
• Web Site: http://id.ndl.go.jp/bib/8544622
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8544622
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN