Surface damage induced by focused-ion-beam milling in a Si/Si p-n junction cross-sectional specimen

Author(s)

Journal

  • Applied Surface Science

    Applied Surface Science 241, 80-86, 2005

Cited by:  1

Codes

  • NII Article ID (NAID)
    10020737008
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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