In Situ Temperature Measurement of Silicon Semiconductor Wafers
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- IUCHI Tohru
- Dept. of Mechanical Engineering, Toyo University
Bibliographic Information
- Other Title
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- シリコン半導体ウエハのin situ温度計測
- シリコン ハンドウタイ ウエハ ノ in situ オンド ケイソク
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Journal
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- Journal of The Society of Instrument and Control Engineers
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Journal of The Society of Instrument and Control Engineers 47 (5), 395-402, 2008-05-10
The Society of Instrument and Control Engineers
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Details
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- CRID
- 1390575683445802112
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- NII Article ID
- 10021115066
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- NII Book ID
- AN00072406
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- ISSN
- 18838170
- 04534662
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- NDL BIB ID
- 9527531
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
- KAKEN