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HfAlO(N)ゲート絶縁膜の構造変化と電気特性

1 Citations

生田目俊秀

Journal

応用電子物性分科会誌

応用電子物性分科会誌 9 (4), 216-219, 2003

Citations (1)*help

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Details 詳細情報について

CRID

1571980075500745216
NII Article ID

10021130121
Data Source
- CiNii Articles

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