電荷転送効果によるGaN紫外線センサーに関する基礎検討 Basic Study on GaN Ultraviolet Sensor Based on Charge Transport Effect
The GaN material has good semiconductor and peizoelectric nature. It is used to realize various electronic, optical and surface acoustic wave (SAW) devices with high power and high frequency. In this paper, we study basic characteristics of a GaN ultraviolet (UV) sensor based on effect of acoustic wave charge transfer on GaN epitaxial film. We fabricated the test devices using GaN film with different conductance and measured basic sensing characteristics using two measuring systems. For conductive GaN film, the carriers in GaN film could be controlled by side electrode. When applied voltage of side electrode is 15V, the AC component of output signal is increasing with increasing of SAW input RF power. The DC component of output signal is proportional to UV intensity form 0.1μW/cm<sup>2</sup> to 5μW/cm<sup>2</sup>. For semi-insulating GaN film, the DC component of output signal of SAW mode and layer mode also are proportional to UV intensity from 0.1μW/cm<sup>2</sup> to 1.5μW/cm<sup>2</sup>, but it indicated different polarity. For insulating GaN film, the charge transfer efficiency is relatively higher than the semi-insulating film and the conductive film. We detected very small UV intensity about 0.2μW/cm<sup>2</sup> under -25dbm SAW input RF power.
- 電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society
電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 128(6), 872-877, 2008-06-01