A MEMS 1-D optical scanner for laser projection display using self-assembled vertical combs and scan-angle magnifying mechanism

• YODA M.

Journal

• The 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5-9, 2005

  The 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5-9, 2005 2005

Details

• CRID: 1572543025454100352
• NII Article ID: 10021135014
• Data Source:
  • CiNii Articles