Theoretical Analysis of Mechanical-Contact-Based Submicron-Si-Waveguide Optical Microswitch at Telecommunication Wavelengths

この論文にアクセスする

この論文をさがす

著者

抄録

We present the theoretical analysis of a novel mechanical-contact-based submicron-Si-waveguide optical switch. The switch is composed of an identical input and output waveguides, and a movable waveguide driven by a miniature electrostatic comb actuator. The movable waveguide closes the gap between input and output waveguides. Due to mechanical-contact of submicron-Si-waveguides, input light propagates from input waveguide to output waveguide through the movable waveguide. The switch uses a transverse-electric-like polarized single-mode light at 1.55 μm telecommunication wavelength as the incident light. Theoretical calculations suggest that the optical switch with contact-tip waveguides at 45° tip angle can realize very sharp output signal change. As a result, 97.0 % transmission at the on state and 0.2 % transmission at the off state, corresponding to approximately 96.8 % optical output signal change between on and off states, are theoretically achieved by a displacement of 400 nm. Possible fabrication imperfections are estimated and their effects on the optical performance are calculated. Enlargement of all contact-tip surfaces is understood to be a promising approach for the switch performance enhancement against possible fabrication imperfections.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(3), 80-84, 2008-03-01

    一般社団法人 電気学会

参考文献:  14件中 1-14件 を表示

各種コード

  • NII論文ID(NAID)
    10021135026
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    9400689
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ