Development of Oxide Semiconductor Thick Film Gas Sensor for the Detection of Total Volatile Organic Compounds

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  • 酸化物半導体厚膜を用いたＴＶＯＣセンサの開発
  • サンカブツ ハンドウタイ コウマク オ モチイタ TVOC センサ ノ カイハツ

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Abstract

After an amendment of Building Standards Law in 2003, the installation of the ventilator is compulsory in the newly built house. Because many persons suffer from indoor-air pollutants caused by the volatile organic compounds (VOCs). The final purpose of this research is to develop the gas sensor which can monitor the gross weight of VOC gases indoors and then to control the ventilator efficiently using the sensor. In order to develop the sensor which detects total VOC, the responses of 4 oxide semiconductor materials to 37 kinds of VOC gases were studied. Those materials showed small responses to halogenated and aliphatic hydrocarbon gases. As a result of improving the response to these gases, among 4 metal oxides examined, SnO2 and WO3 showed high sensitivities by the addition of Pd and Pt. The sensing properties of SnO2 for halogenated hydrocarbon gases were extremely improved by the addition of 0.5wt% Pd. Also, the sensing properties of SnO2 for aliphatic hydrocarbon gases were improved by the addition of 0.7wt% Pt. In addition, the doubly promoted element, Pt(0.5wt%)-Pd(0.5wt%)-SnO2, showed a large response to many kinds of VOC gases examined.

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