Fabrication of Microcoils Using X-ray Lithography and Metallizaiton
Coils and actuators are finding an increasing number of uses in various fields. The demand for microcoils and microactuators is increasing due to the recent progress in downsizing and the increasing sophistication of various industrial products. Actuators account for a large percentage of the total volume and weight of many product compared with other parts and devices that are typically included. However, coils are unsuitable for miniaturization because of their structure. Therefore, we have proposed the use of high aspect ratio microcoils in order to reduce their size and to increase their performance. To realize microcoils such as these, we have developed a fabrication process based on three-dimensional deep X-ray lithography and metallization techniques. We have also used a dipping method in order to obtain thick layers of photoresist on metal bar with diameters of 1 mm. In this paper, we have fabricated microcoils with 10 μm line widths, 20 μm pitch, and aspect ratio of over 5. There is every expectation that high performance microcoils with high aspect ratio coil lines could be manufactured by this process, despite their miniature size.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(5), 181-185, 2008-05-01
The Institute of Electrical Engineers of Japan