Fabrication of Microcoils Using X-ray Lithography and Metallizaiton

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Coils and actuators are finding an increasing number of uses in various fields. The demand for microcoils and microactuators is increasing due to the recent progress in downsizing and the increasing sophistication of various industrial products. Actuators account for a large percentage of the total volume and weight of many product compared with other parts and devices that are typically included. However, coils are unsuitable for miniaturization because of their structure. Therefore, we have proposed the use of high aspect ratio microcoils in order to reduce their size and to increase their performance. To realize microcoils such as these, we have developed a fabrication process based on three-dimensional deep X-ray lithography and metallization techniques. We have also used a dipping method in order to obtain thick layers of photoresist on metal bar with diameters of 1 mm. In this paper, we have fabricated microcoils with 10 μm line widths, 20 μm pitch, and aspect ratio of over 5. There is every expectation that high performance microcoils with high aspect ratio coil lines could be manufactured by this process, despite their miniature size.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(5), 181-185, 2008-05-01

    一般社団法人 電気学会

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各種コード

  • NII論文ID(NAID)
    10021135249
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    9496117
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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