A Hard-Disk Drive Tracking Servo Microactuator Driven by PZT with Stroke Amplification Mechanism

• HIRANO T.

Journal

• International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2005

  International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2005 2005

Details

• CRID: 1570572700617203968
• NII Article ID: 10021135474
• Data Source:
  • CiNii Articles