Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation

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Author(s)

    • Hirota Takeshi HIROTA Takeshi
    • Department of Molecular and Materials Sciences, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
    • SUGIMOTO Youhei
    • Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
    • TAKATA Naoki
    • Department of Metallurgy and Ceramics Science, Graduate School of Science and Technology, Tokyo Institute of Technology
    • IKEDA Ken-ichi
    • Department of Electrical and Material Sciences, Faculty of Engineering Sciences, Kyushu University
    • NAKASHIMA Hideharu
    • Department of Electrical and Material Sciences, Faculty of Engineering Sciences, Kyushu University
    • NAKASHIMA Hiroshi
    • Art, Science and Technology Center for Cooperative Research, Kyushu University

Abstract

The formation behavior of polycrystalline silicon thin films during the aluminum induced crystallization (AIC) process was investigated by scanning transmission electron microscopy (STEM) and <I>in-situ</I> heating transmission electron microscopy (TEM) observations. The STEM observation and electron dispersive X-ray spectroscopy (EDS) analysis of <I>ex-situ</I> heat-treated specimen revealed that the a-Si layer and Al layer switched the positions with each other during the heat treatment, resulting the crystallization of the a-Si layer. Furthermore, the <I>in-situ</I> heating TEM observation and EDS analysis of as-deposited specimen revealed the mixed state of Si and Al in an a-Si/Al film and the lateral growth of crystalline Si grain during the heating. The mechanism of AIC and switching layers were also discussed from the experimental results and the binary phase diagram of Al-Si system.

Journal

  • MATERIALS TRANSACTIONS

    MATERIALS TRANSACTIONS 49(4), 723-727, 2008-04-01

    The Japan Institute of Metals

References:  16

Codes

  • NII Article ID (NAID)
    10021145626
  • NII NACSIS-CAT ID (NCID)
    AA1151294X
  • Text Lang
    ENG
  • Article Type
    ART
  • ISSN
    13459678
  • NDL Article ID
    9447206
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z53-J286
  • Data Source
    CJP  NDL  IR  J-STAGE 
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