Effect of CH/C<SUB>2</SUB> Species Density on Surface Morphology of Diamond Film Grown by Microwave Plasma Jet Chemical Vapor Deposition

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  • Su Chun-Hsi
    Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technology
  • Chang Ching-Yu
    Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technology

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  • Effect of CH/C2 species density on surface morphology of diamond film grown by microwave plasma jet chemical vapor deposition

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Abstract

The present research employs in-situ plasma Optical Emission Spectroscopy (OES) to explore the effect of microwave plasma jet chemical vapor deposition (MPJCVD) on activating CH4+H2 plasma environment and synthesizing diamond film. Surface morphology and main orientation of lattice plane of the diamond synthesized under different processing parameters are also examined. Since species such as CH, H2, hydrogen Balmer alpha (Hα), carbon dimer (C2) and hydrogen Balmer beta Hβ in the plasma radical are easily influenced by gas concentration, substrate temperature and processing parameters, in-situ OES is employed to diagnose in-situ OES diagnosing is employed to composition of plasma species in the synthesis of diamond film. Our findings reveal that species such as CH, C2 and Hβ in microwave plasma jet have significant influence on grain size, surface morphology and H/C carbon concentration. The Raman spectrum measurement can prove the relationship between CH/C2 species density and diamond surface morphology.

Journal

  • MATERIALS TRANSACTIONS

    MATERIALS TRANSACTIONS 49 (6), 1380-1384, 2008

    The Japan Institute of Metals and Materials

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