Inner Structure ⁄ Elastic Modulus Control of Micro Cantilever

• MIWA Masafumi

  Institute of Technology and Science, The University of Tokushima

• MICHINOMOTO Takurou

  Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University

• KIKUCHI Kunitomo

• TSUCHITANI Shigeki

  Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University

• YONEYAMA Satoru

  Department of Mechanical Engineering, Aoyama Gakuin University

Bibliographic Information

Other Title

• Inner structure/elastic modulus control of micro cantilever

Abstract

It is important to know mechanical properties of micro structures fabricated as a micro machine component by micro-stereolithography (μSL). In the previous study, we reported that elastic modulus of a micro-cantilever fabricated by μSL is controllable by irradiation laser power and postcure processing time. In this study, micro-cantilevers are formed by changing lamination pitch (10 μm to 25 μm) and lamination orientation. Then, the relation between the load and the deflection of the cantilever is evaluated. Experimental results show that the elastic modulus of the cantilever decreases with the increase of the lamination pitch.

Journal

• Journal of the Japanese Society for Experimental Mechanics

  Journal of the Japanese Society for Experimental Mechanics 8 (Special_Issue), s94-s97, 2008

  The Japanese Society for Experimental Mechanics

Keywords

• Micro-stereolithography
• Elastic Modulus
• Micro-cantilever

Details

• CRID: 1390282680166783360
• NII Article ID: 10021156108
• NII Book ID: AA11822914
• DOI: 10.11395/jjsem.8.s94
• ISSN: 18844219
• ISSN: 13464930
• NDL BIB ID: 9568124
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9568124
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • CiNii Articles
• Abstract License Flag: Disallowed