Simple Evaporator for Metal Evaporation Mounted on a Conflat Flange with an Outer Diameter of 70 mm

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  • IIJIMA Chihiro
    Faculty of Education, Gunma University
  • MASE Kazuhiko
    Institute of Materials Structure Science, KEK The Graduate University for Advanced Studies PRESTO, Japan Science and Technology Agency
  • OKUSAWA Makoto
    Faculty of Education, Gunma University

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  • 外径７０ｍｍのコンフラットフランジにマウントした簡易型金属蒸着源の製作
  • ガイケイ 70mm ノ コンフラット フランジ ニ マウントシタ カンイガタ キンゾク ジョウチャクゲン ノ セイサク

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Abstract

  We introduce a simple evaporator for metal evaporation mounted on a conflat flange with an outer diameter of 70 mm. It consists of a tantalum filament, an aluminum tube with a pinhole, and a four-pin feedthrough mounted on a conflat flange with an outer diameter of 70 mm.<br>

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