Work Function Controlled Transparent Conductive Films with Zinc Oxide System by Pulsed Laser Deposition Method

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  • YOSHIDA Kazuo
    Department of Electrical, Information and Communication, College of Engineering, Osaka Sangyo University
  • AOKI Takanori
    Department of Electrical, Information and Communication, College of Engineering, Osaka Sangyo University
  • SUZUKI Akio
    Department of Electrical, Information and Communication, College of Engineering, Osaka Sangyo University
  • MATSUSHITA Tatsuhiko
    Department of Electrical, Information and Communication, College of Engineering, Osaka Sangyo University
  • OKUDA Masahiro
    Okuda Technical Office

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  • パルスレーザー堆積法により作製した酸化亜鉛系透明導電膜の仕事関数制御
  • パルス レーザー タイセキホウ ニ ヨリ サクセイシタ サンカ アエンケイ トウメイ ドウデン マク ノ シゴト カンスウ セイギョ

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Abstract

  Approximately 200-nm-thick transparent conducting GZO films (ZnO doped with 5 wt.% Ga2O3) have been deposited on glass substrates at room temperature using a pulsed laser deposition (PLD) using Nd:YAG laser (λ=1064 nm). It was recognized that the work function of the GZO films increased from 4.6 eV for the as-deposited state to 5.1 eV for the annealed state at 400°C.<br>

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