Surface Science and MEMS

• FUJITA Hiroyuki

  Institute of Industrial Science, The University of Tokyo

Bibliographic Information

Other Title

• 表面科学とMEMS

Journal

• Hyomen Kagaku

  Hyomen Kagaku 29 (6), 335-335, 2008

  The Surface Science Society of Japan

Details

• CRID: 1390001206458477056
• NII Article ID: 10021166280
• NII Book ID: AN00334149
• DOI: 10.1380/jsssj.29.335
• ISSN: 18814743
• ISSN: 03885321
• Web Site: http://www.jstage.jst.go.jp/article/jsssj/29/6/29_6_335/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles